Standard Group - High Purity Gases and Specialty Gases Supplier

Silane SiH4

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Detailed Description

Product Introduction:

1. Properties: colorless gas with a disgusting smell of garlic.

2. Density: 1.44g/L

3. Relative vapor density: 1.2g/mL

4. Melting point: -185ºC

5. Boiling point: -111.9ºC

6. Boiling point: -112ºC

7. Critical temperature: -3.5ºC

8. Critical pressure: 4.864MPa

9. Solubility: soluble in water, almost insoluble in ethanol, ether, benzene, chloroform, silicon chloroform and silicon tetrachloride.

10. Critical volume: 151.5 (calculated) / 136.75 (measured) cm3/mol. Silane is a compound of silicon and hydrogen, and is a general term for a series of compounds, including monosilane (SiH4), disilane (Si2H6) and some higher silicon hydrogen compounds. Currently, monosilane is the most widely used. Generally, monosilane is referred to as silane.

As a gas source for providing silicon components, silane can be used to manufacture high-purity polycrystalline silicon, single crystal silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, heterogeneous silicon, and various metal silicides. Due to its high purity and ability to achieve fine control, it has become an important specialty gas that cannot be replaced by many other silicon sources. Silane is widely used in the microelectronics and optoelectronics industries, used to manufacture solar cells, flat panel displays, glass and steel coatings, and is the only intermediate product in the world for large-scale production of granular high-purity silicon. High-tech applications of silane are still emerging, including for the manufacture of advanced ceramics, composite materials, functional materials, biomaterials, high-energy materials, etc., becoming the basis of many new technologies, new materials, and new devices. Silane is also known for its unique self-ignition and explosiveness. Silane has a very wide spontaneous ignition range and extremely strong combustion energy, which determines that it is a highly dangerous gas.

Technical parameters:

 

No. Name Chemical formula Purity (%) Pressure (Mpa) Filling volume (m3/kg) Valve thread outlet
1 Silane SiH4 99.9999   10 CGA350/Diss632

 

 

Project Name Impurity Content (ppm)
Purity Index of Tridane (%) ≥99.9999
Ar ≤0.05
Chiorosilane ≤0.15
Si2H6 ≤0.5
He ≤1
CO ≤0.05
O2 ≤0.05
N2 ≤1
H2 ≤20
CO2 ≤0.05
CH4 ≤0.05
C ≤0.2
SiH2CI2 ≤0.5
CH3Si ≤0.5
Metals ≤0.03
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