Product Details
Product Names
Electronic Grade Trifluoromethane
High-Purity Trifluoromethane
Trifluoromethane (CHF₃)
Purity
Electronic Grade Trifluoromethane: ≥99.9995%
High-Purity Trifluoromethane: ≥99.999%
Impurity Content (ppm)
| Impurity | Electronic Grade | High-Purity |
|---|---|---|
| Oxygen + Argon (O₂+Ar) | ≤0.5 | ≤1.0 |
| Nitrogen (N₂) | ≤2.0 | ≤3.0 |
| Hydrogen (H₂) | ≤0.3 | Not Specified |
| Carbon Monoxide (CO) | ≤0.3 | ≤1.0 |
| Carbon Dioxide (CO₂) | ≤0.3 | ≤1.0 |
| Methane (CH₄) | ≤0.3 | Not Specified |
| OFC (CHCl₂F, CH₂F₂, CHClF₂, CCl₂F₂, 1.1.1-C₂H₃F₃, CF₄) | ≤1.0 | ≤3.0 |
| Moisture (H₂O) | ≤1.0 | ≤1.0 |
| Acidity (as HF) | ≤0.1 | ≤0.1 |
| Total Impurity Content | ≤5.0 | ≤10.0 |
Packaging
Available in 43.3L DOT cylinders, 440L Y-cylinders, and bulk tank trucks.
Applications
Used as a plasma etchant in the electronics industry and as a raw material for fluorocarbon compounds.
Safety Information
CAS Number: 75-46-7.
Physical and Chemical Properties: Colorless and odorless gas. Soluble in water. Melting point (℃): -155; Boiling point (℃): -84; Relative density (water=1): 1.52 (-80℃); Relative density (air=1): 2.43; Saturation vapor pressure (kPa): 2504 (20℃); Flash point (℃): Not applicable; Combustion heat (kJ/mol): Not applicable; Critical temperature (℃): 25.7; Critical pressure (MPa): 4.84; Upper explosion limit (v%): Not applicable; Lower explosion limit (v%): Not applicable; Ignition temperature (℃): Not applicable.
Combustion and Explosion Hazards: Non-flammable, but decomposes upon heating to release toxic fumes.
Firefighting Methods: Non-flammable. Firefighters must wear full protective clothing and fight the fire from the upwind direction. Cut off the gas supply. Spray water to cool the container, and if possible, remove the container from the fire area to an open space. Fire extinguishing agents: foam, carbon dioxide.
Health Hazards: Contact can cause headache, nausea, and vomiting, and has anesthetic effects.
First Aid Measures: Inhalation: Quickly move to a fresh air area. Keep the airway clear. If breathing is difficult, administer oxygen. If breathing stops, perform artificial respiration immediately. If breathing and heartbeat stop, perform artificial respiration and external chest compressions immediately.
