Product Details
Product Name
Electronic Industry Grade Sulfur Hexafluoride
Sulfur Hexafluoride (SF₆)
Purity
Electronic Industry Grade: ≥99.999%
High-Purity: ≥99.9995%
Impurity Content (ppm)
| Impurity | Electronic Grade | High-Purity |
|---|---|---|
| Oxygen + Argon (O₂+Ar) | ≤1.0 | ≤0.5 |
| Nitrogen (N₂) | ≤2.0 | ≤2.0 |
| Hydrogen (H₂) | ≤0.3 | ≤0.1 |
| Carbon Tetrafluoride (CF₄) | ≤0.3 | ≤0.1 |
| Carbon Monoxide (CO) | ≤0.3 | ≤0.1 |
| Carbon Dioxide (CO₂) | ≤0.5 | ≤0.2 |
| Hydrocarbons (THC) | ≤0.3 | ≤0.1 |
| Hexafluoroethane (C₂F₆) | ≤5.0 | ≤2.0 |
| Perfluoropropane (C₃F₈) | ≤2.0 | ≤1.0 |
| Moisture (H₂O) | ≤1.0 | ≤1.0 |
| Total Impurity Content | ≤10.0 | ≤5.0 |
| Acidity (as HF) | ≤0.1 | ≤0.1 |
| Hydrolyzable Fluorides (as HF) | ≤0.3 | ≤0.3 |
Packaging
Available in 43.3L DOT cylinders, 440L Y-cylinders, and bulk tank trucks.
Applications
Sulfur hexafluoride is an ideal etching agent used extensively in microelectronics. With the advancement of technology, the application fields of SF₆ are continuously expanding and are widely used in more basic and scientific fields.
Safety Information
CAS Number: 2551-62-4.
Physical and Chemical Properties: Colorless and odorless gas, slightly soluble in water, ethanol, and ether. Melting point (℃): -51; Boiling point (℃): No data; Relative density (water=1): 1.67 (-100℃); Relative vapor density (air=1): 5.11; Saturation vapor pressure (kPa): Not applicable; Critical temperature (℃): 45.6; Combustion heat (kJ/mol): Not applicable; Critical pressure (MPa): 3.37; Flash point (℃): Not applicable; Ignition temperature (℃): Not applicable; Upper and Lower Explosion Limits (v%): Not applicable.
Combustion and Explosion Hazards: Non-flammable. Under high heat, the pressure inside the container may increase, posing a risk of rupture and explosion.
Firefighting Methods: Non-flammable. Cut off the gas supply. Spray water to cool the container, and if possible, remove the container from the fire area to an open space. Choose appropriate extinguishing agents based on the cause of the fire.
Health Hazards: Route of exposure: Inhalation. Pure product is essentially non-toxic. However, if contaminated with low molecular weight fluorides, hydrogen fluoride, especially decfluorane, the toxicity increases.
First Aid Measures: Inhalation: Quickly move to a fresh air area. Keep the airway clear. If breathing is difficult, administer oxygen. If breathing and heartbeat stop, perform cardiopulmonary resuscitation immediately. Seek medical attention.
